
UPVfab completes silicon nitride process equipment line
Valencia, 18th of July, 2023. Funded by the regional government infrastructure programme of Generalitat Valenciana, through grant GVA/IDIFEDER/2021/046, UPVfab has acquired capital equipment to complete the silicon nitride process equipment line. The recent acquisitions include the chemical mechanical polishing (CMP) tool by French vendor Alpsitec and the high-density plasma enhanced chemical vapor deposition (HD-PECVD) by […]





